Selective and sensitive detection of CO gas by In2O3 thick film gas sensors

Abstract

This study aims to provide a better fundamental understanding of the gas sensing mechanism of In₂O₃ gas sensors. In the present work In₂O₃ powder has been derived by calcinations of In₂S₃ powder prepared by flux method. Thick film of In₂O₃ has been deposited utilizing a relatively simple and low cost screen printing technique and characterized by scanning electron microscopy and X-ray diffraction. In₂O₃ thick film exhibits much higher sensitivity to CO at 150 ^°C. The corresponding sensitivity is 10.2 with good selectivity, and the response and recovery times are 6 and 14 s, respectively. The results indicate that the In₂O₃ thick film can be used to fabricate high performance CO sensors.